Trench Depth Measurement Device IR2100
Trench Depth Measurement Device
Non-contact measurement of deep trenches and TSV shapes of power devices, the depth of DRAM capacitor trenches, CD measurements, and recess measurements. High aspect ratio trench measurements are possible with the proprietary technology MBIR (Model Based Infrared). It also supports the measurement of the vertical profile of the doping concentration of epitaxial films.
- Company：日本セミラボ 新横浜本社
- Price：Other
